Consists of a surface-mount MEMS Pirani sensor and microcontroller-based measurement electronics, all packaged in an ultra-compact PCB assembly that provides a connector-end wiring harness. It is Posifa Technologies that supplies its new PVC4100 series of fully calibrated MEMS Pirani vacuum sensors.
To compensate for changes in thermal conductivity with changes in ambient temperature, the device provides a temperature compensation algorithm that takes input from a built-in temperature sensor. The device's sensor element is based on the company's second-generation MEMS thermal conduction chip, which works on the principle that the thermal conductivity of a gas is proportional to its vacuum pressure. The sensor's microcontroller is based on measuring electronically amplifies and digitizes the sensor's signal, providing an output via an I²C interface
The device combines low power consumption with a fast response time of 250ms, and a wide effective range from 0.1 mTorr (0.013 Pa) to 1 atm (760 torr, or 101 kPa) with 15% accuracy from 1 mTorr to 200,000 mTorr . This transducer is ideal for digital vacuum gauges and leak detection in closed systems maintained under the primary vacuum pump, including vacuum insulation panels.
