Infineon Technologies AG has made significant progress in the development of capacitive micromechanical ultrasonic transducer (CMUT) technology. With this technology, the company has introduced the first highly integrated single-chip solution for microelectromechanical systems (MEMS)-based ultrasonic sensors with a smaller footprint and more robust performance and functionality for a wide range of applications in the development of new ultrasonic applications as well as for the improvement of existing applications in the fields of consumer electronics, automotive industry and medical technology.
CMUT in eWLB package
Emanuele Bodini, Senior Director of Infineon Technologies, said: “Infineon's ultrasonic technology enables high signal-to-noise ratios and integration levels, so we believe that this device represents a major breakthrough for the industry. We hope to utilize this technology to develop a product platform that serves multiple application scenarios in different industries.”
Unlike conventional piezoelectric materials, which rely on the deformation of the material itself, CMUTs transmit and detect ultrasound waves through the deflection of a micromachined semiconductor diaphragm. With this principle coupled with small size, low power consumption and high performance, the device is able to enhance a variety of ultrasonic applications. Infineon's integrated MEMS and ASIC technology reduces noise floor to one-twentieth that of conventional piezoelectric ceramic materials of the same size and enhances the absolute signal by a factor of one thousand compared to single-tube solutions. With its expertise in semiconductor design and manufacturing, Infineon is able to apply its advanced technologies to a wide range of industries, from consumer electronics to medical devices.
Improved solid-state touch buttons
Infineon's CMUT technology enables solid-state touch buttons to be realized under any solid material, such as glass or even metal, without deforming the surface. This provides a more durable and reliable alternative to traditional mechanical buttons, reducing the risk of wear and tear and extending the overall life of the device. Compared to capacitive touch buttons, which can be affected by environmental factors such as humidity and temperature, CMUT-based touch buttons are fully water compatible and have high electromagnetic compatibility (EMC). Since the technology reduces the size of the buttons, it can be integrated into devices ranging from smartphones to industrial control panels, enabling, for example, touch buttons to be mounted under the metal frame of a cell phone or replacing a car door handle for a neat design.
Liquid level sensing
A number of household appliances that require liquid level sensing can benefit from Infineon's CMUT, which offers several advantages, including continuous measurement of the fill level, low power consumption and easy, non-destructive mounting underneath the bottom of the tank. This last point is important for measuring chemicals in, for example, washing machines or dishwashers, as contact electrodes can corrode.
Advanced medical applications
CMUT technology can also be used to develop innovative medical devices that use ultrasound technology, such as wearable devices for vital sign monitoring, health tracking and non-invasive medical diagnostics. With CMUT technology, these devices provide continuous monitoring and feedback rather than single measurements, enabling earlier detection of potential health problems and improved patient outcomes. Due to their small size and low power consumption, they are well suited for wearables and sentinel care applications.
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